The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2021
Filed:
Nov. 07, 2018
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Hyunjae Song, Hwaseong-si, KR;
Keunwook Shin, Yongin-si, KR;
Hyeonjin Shin, Suwon-si, KR;
Changseok Lee, Seoul, KR;
Changhyun Kim, Seoul, KR;
Kyungeun Byun, Seongnam-si, KR;
Seungwon Lee, Hwaseong-si, KR;
Eunkyu Lee, Yongin-si, KR;
Assignee:
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); C01B 32/186 (2017.01); H01L 23/532 (2006.01); H01L 21/285 (2006.01); H01L 21/768 (2006.01); C23C 16/26 (2006.01); C23C 16/50 (2006.01); H01L 27/24 (2006.01); C01B 32/182 (2017.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
C01B 32/186 (2017.08); C01B 32/182 (2017.08); C23C 16/26 (2013.01); C23C 16/50 (2013.01); H01L 21/28525 (2013.01); H01L 21/76843 (2013.01); H01L 23/53276 (2013.01); H01L 27/24 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C01B 2204/26 (2013.01); C01B 2204/30 (2013.01); C01P 2002/60 (2013.01); C01P 2002/85 (2013.01); C01P 2006/10 (2013.01); H01L 23/53238 (2013.01); H01L 23/53266 (2013.01);
Abstract
Provided are nanocrystalline graphene and a method of forming the nanocrystalline graphene through a plasma enhanced chemical vapor deposition process. The nanocrystalline graphene may have a ratio of carbon having an spbonding structure to total carbon within the range of about 50% to 99%. In addition, the nanocrystalline graphene may include crystals having a size of about 0.5 nm to about 100 nm.