The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 16, 2021

Filed:

Nov. 06, 2019
Applicant:

Sandisk Technologies Llc, Addison, TX (US);

Inventors:

Naoki Ookuma, Kanagawa, JP;

Hiroki Yabe, Kanagawa, JP;

Koichiro Hayashi, Kanagawa, JP;

Takuya Ariki, Kanagawa, JP;

Toru Miwa, Kanagawa, JP;

Assignee:

SanDisk Technologies LLC, Addison, TX (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11582 (2017.01); H01L 23/528 (2006.01); H01L 27/11526 (2017.01); H01L 27/11556 (2017.01); H01L 21/02 (2006.01); H01L 21/28 (2006.01); H01L 27/11573 (2017.01); H01L 21/311 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 21/02636 (2013.01); H01L 23/5283 (2013.01); H01L 27/11526 (2013.01); H01L 27/11556 (2013.01); H01L 27/11573 (2013.01); H01L 29/40114 (2019.08); H01L 29/40117 (2019.08); H01L 21/0217 (2013.01); H01L 21/0274 (2013.01); H01L 21/02164 (2013.01); H01L 21/02208 (2013.01); H01L 21/02271 (2013.01); H01L 21/31116 (2013.01);
Abstract

A non-volatile memory apparatus is provided and includes a substrate having a major surface extending longitudinally. A stack of first and second sets of word lines and insulating layers extends along and over the major surface longitudinally and alternating with and overlying one another vertically to define a device region. The first and second sets of word lines each respectively extends longitudinally beyond a first and second side of the device region a decreasing longitudinal distance from the device region as a vertical distance from the major surface increases to define first and second stepped contact regions. Word line contacts extend vertically in the first and second stepped contact regions. The second set of word lines in the first stepped contact region do not contact the word line contacts and the first set of word lines in the second stepped contact region do not contact the word line contacts.


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