The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2021
Filed:
Aug. 29, 2019
Applicant:
Shinko Electric Industries Co., Ltd., Nagano, JP;
Inventor:
Tomotake Minemura, Nagano, JP;
Assignee:
SHINKO ELECTRIC INDUSTRIES CO., LTD., Nagano, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); C04B 37/02 (2006.01); H01L 21/67 (2006.01); C04B 41/90 (2006.01); C04B 35/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); C04B 35/00 (2013.01); C04B 37/02 (2013.01); C04B 41/90 (2013.01); H01L 21/67103 (2013.01); H01L 21/6835 (2013.01);
Abstract
A ceramics substrate includes: a substrate body; and an electric conductor patient that is provided in the substrate body. The substrate body is made of ceramics containing aluminum oxide. The electric conductor pattern is a sintered body that contains tungsten as a main component and further contains nickel oxide, aluminum oxide and silicon dioxide.
Minemura, Tomotake. (2021). Ceramic substrate containing aluminum oxide and electrostatic chuck having electrode containing tungsten with oxides (U.S. Patent No. 11177152). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11177152
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile