The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2021
Filed:
May. 10, 2019
Fei Company, Hillsboro, OR (US);
Thomas Gary Miller, Portland, OR (US);
John F. Flanagan, IV, Hillsboro, OR (US);
Brian Routh, Jr., Beaverton, OR (US);
Richard Young, Beaverton, OR (US);
Brad Larson, Portland, OR (US);
Aditee Shrotre, Hillsboro, OR (US);
FEI Company, Hillsboro, OR (US);
Abstract
Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been reached, the end point based on a feature of interest out of the plurality of features observable in the image, and based on the end point not being reached, removing a layer of material from the surface of the sample.