The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2021
Filed:
Mar. 17, 2017
Inficon, Inc., East Syracuse, NY (US);
Mohamed Buhary Rinzan, Manlius, NY (US);
INFICON, INC., East Syracuse, NY (US);
Abstract
Devices, systems and methods for process monitoring are presented. For instance, the device includes a crystal and a reactance sensor. The crystal is connected to a frequency measurement circuit. The reactance sensor is connected to the crystal. The reactance sensor is configured to detect a change in a process parameter. The frequency measurement circuit detects the change in the process parameter as a change in the frequency of the crystal. In another example, the system includes a reactance sensor and a measurement device. The reactance sensor is disposed in a process chamber, and has a variable reactance responsive to a change in a process parameter. The measurement device is disposed outside the process chamber and has a frequency measurement circuit. The frequency measurement circuit includes a crystal and is connected to the reactance sensor, and detects the change in the process parameter as a change in the frequency of the crystal.