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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11174159 B1

PDFFull Text
Expired
Date of Patent:
Nov. 16, 2021

Filed:

Aug. 20, 2013

Micro-electromechanical device having a soft magnetic material electrolessly deposited on a metal layer

Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

William J. Gallagher, Ardsley, NY (US);

Eugene J. O'Sullivan, Nyack, NY (US);

Naigang Wang, Ossining, NY (US);

Assignee:

INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);

Attorneys:

Cantor Colburn LLP

Robert Sullivan

Primary Examiner:

Anh D Mai

Int. Cl.
CPC ...
H01L 43/14 (2006.01); B81C 1/00 (2006.01); B81B 3/00 (2006.01); H01L 43/10 (2006.01); H01L 43/12 (2006.01); H01L 49/02 (2006.01); H01F 41/04 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00373 (2013.01); B81B 3/0021 (2013.01); B81C 1/00142 (2013.01); B81C 1/00706 (2013.01); H01L 43/10 (2013.01); H01L 43/12 (2013.01); H01L 43/14 (2013.01); B81B 2201/038 (2013.01); B81B 2203/0118 (2013.01); B81C 2201/0188 (2013.01); H01F 41/046 (2013.01); H01L 28/10 (2013.01);
Abstract

A micro-electromechanical device and method of manufacture are disclosed. A sacrificial layer is formed on a silicon substrate. A metal layer is formed on a top surface of the sacrificial layer. Soft magnetic material is electrolessly deposited on the metal layer to manufacture the micro-electromechanical device. The sacrificial layer is removed to produce a metal beam separated from the silicon substrate by a space.

Find Patent Forward Citations

Gallagher, William. (2021). Micro-electromechanical device having a soft magnetic material electrolessly deposited on a metal layer (U.S. Patent No. 11174159). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11174159

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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