The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 09, 2021

Filed:

Mar. 13, 2019
Applicant:

Soitec, Bernin, FR;

Inventors:

Jean-Marc Bethoux, La Buisse, FR;

Morgane Logiou, Crolles, FR;

Raphaél Caulmilone, Saint Pancrasse, FR;

Assignee:

Soitec, Bernin, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/00 (2010.01); H01L 33/06 (2010.01); H01L 27/15 (2006.01); H01L 31/18 (2006.01); H01L 33/32 (2010.01); H01L 21/02 (2006.01); H01L 25/075 (2006.01); H01L 33/02 (2010.01);
U.S. Cl.
CPC ...
H01L 33/0075 (2013.01); H01L 21/0254 (2013.01); H01L 21/02422 (2013.01); H01L 21/02458 (2013.01); H01L 21/02639 (2013.01); H01L 25/0753 (2013.01); H01L 27/153 (2013.01); H01L 31/1848 (2013.01); H01L 31/1864 (2013.01); H01L 33/06 (2013.01); H01L 33/32 (2013.01); H01L 33/0093 (2020.05); H01L 33/025 (2013.01);
Abstract

A method for manufacturing a plurality of crystalline semiconductor islands having a variety of lattice parameters includes the following steps: providing a relaxation substrate that comprises a medium, a flow layer disposed on the medium and, a plurality of strained crystalline semiconductor islands having an initial lattice parameter located on the flow layer, a first group of islands having a first lattice parameter and a second group of islands having a second lattice parameter that is different from the first; and heat treating the relaxation substrate at a relaxation temperature greater than or equal to the glass transition temperature of the flow layer to cause differentiated lateral expansion of the islands of the first and second group. The lattice parameter of the relaxed islands of the first group and the relaxed islands of the second group then have different values.


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