The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 09, 2021

Filed:

Feb. 01, 2018
Applicant:

Freiberger Compound Materials Gmbh, Freiberg, DE;

Inventors:

Wolfram Fliegel, Dresden, DE;

Christoph Klement, Chemnitz, DE;

Christa Willnauer, Dorfhain, DE;

Max Scheffer-Czygan, Chemnitz, DE;

André Kleinwechter, Freiberg, DE;

Stefan Eichler, Dresden, DE;

Berndt Weinert, Freiberg, DE;

Michael Mäder, Coswig, DE;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/42 (2006.01); H01L 21/02 (2006.01); G01N 21/21 (2006.01); H01L 29/20 (2006.01); G01N 21/17 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02054 (2013.01); C30B 29/42 (2013.01); G01N 21/211 (2013.01); H01L 21/02046 (2013.01); H01L 21/02052 (2013.01); H01L 21/02395 (2013.01); H01L 29/20 (2013.01); G01N 2021/178 (2013.01); Y10T 428/24355 (2015.01);
Abstract

The present invention relates to a novel provided gallium arsenide substrates as well as the use thereof. The gallium arsenide substrates provided according to the invention exhibit a so far not obtained surface quality, in particular a homogeneity of surface properties, which is detectable by means of optical surface analyzers, by way of example by means of ellipsometric lateral substrate mapping for optical contact-free quantitative characterization.


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