The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 09, 2021

Filed:

Mar. 19, 2019
Applicant:

Kla-tencor Corporation, Milpitas, CA (US);

Inventors:

Ian Riley, San Jose, CA (US);

Li He, San Jose, CA (US);

Sankar Venkataraman, Milpitas, CA (US);

Michael Kowalski, Scotts Valley, CA (US);

Arjun Hegde, Newark, CA (US);

Assignee:

KLA-Tencor Corp., Milpitas, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G06K 9/62 (2006.01); G06N 20/00 (2019.01); G06F 3/0482 (2013.01); G06T 7/00 (2017.01); G06N 3/08 (2006.01);
U.S. Cl.
CPC ...
G06K 9/6256 (2013.01); G06F 3/0482 (2013.01); G06K 9/6267 (2013.01); G06N 20/00 (2019.01); G06T 7/001 (2013.01); G06N 3/08 (2013.01); G06T 2200/24 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/20081 (2013.01); G06T 2207/30148 (2013.01);
Abstract

Methods and systems for training a machine learning model using synthetic defect images are provided. One system includes one or more components executed by one or more computer subsystems. The one or more components include a graphical user interface (GUI) configured for displaying one or more images for a specimen and image editing tools to a user and for receiving input from the user that includes one or more alterations to at least one of the images using one or more of the image editing tools. The component(s) also include an image processing module configured for applying the alteration(s) to the at least one image thereby generating at least one modified image and storing the at least one modified image in a training set. The computer subsystem(s) are configured for training a machine learning model with the training set in which the at least one modified image is stored.


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