The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2021
Filed:
Feb. 02, 2021
Applicant:
Disco Corporation, Tokyo, JP;
Inventor:
Naoko Yamamoto, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B29C 65/00 (2006.01); B28D 5/00 (2006.01); H01L 21/683 (2006.01); B28D 5/04 (2006.01); B29C 65/76 (2006.01); B29C 65/78 (2006.01); B29C 65/48 (2006.01); B29C 65/50 (2006.01); B29C 65/74 (2006.01);
U.S. Cl.
CPC ...
B28D 5/0082 (2013.01); B28D 5/0076 (2013.01); B28D 5/04 (2013.01); H01L 21/6836 (2013.01); B29C 65/00 (2013.01); B29C 65/48 (2013.01); B29C 65/50 (2013.01); B29C 65/741 (2013.01); B29C 65/76 (2013.01); B29C 65/7805 (2013.01); B29C 65/7817 (2013.01); H01L 2221/68327 (2013.01);
Abstract
A processing method for a workpiece includes a cutting step of cutting the workpiece along streets by a cutting blade having a V-shaped tip end, to form V grooves of which shallower parts are wider than deeper parts, and a cleaning step of cleaning a back surface of the workpiece with cleaning water, after the cutting step is carried out.