The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2021
Filed:
Jun. 28, 2019
Versum Materials Us, Llc, Tempe, AZ (US);
Charles Michael Birtcher, Tempe, AZ (US);
Robert Eschbach, Tempe, AZ (US);
William Jon Sheehy, Tempe, AZ (US);
James Patrick Nehlsen, Tempe, AZ (US);
Versum Materials US, LLC, Tempe, AZ (US);
Abstract
A chemical precursor container is disclosed. The container includes a vessel and a lid that define an interior volume, an inlet conduit, an outlet conduit, and a flow distributor positioned inside the vessel and in fluid flow communication with the inlet conduit. The flow distributor has an annular shape and includes a distributor floor having a plurality of apertures formed therein for expelling carrier gas therethrough. The flow distributor includes an inner annular wall that defines a porthole in the flow distributor that allows fluid to pass through the flow distributor from the interior volume of the vessel to the outlet conduit.