The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2021
Filed:
May. 11, 2020
Applicant:
Samsung Display Co., Ltd., Yongin-Si, KR;
Inventors:
Assignee:
SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/32 (2006.01); H01L 27/12 (2006.01); H01L 21/3213 (2006.01); H01L 21/311 (2006.01); H01L 51/00 (2006.01); H01L 51/52 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
H01L 27/3276 (2013.01); H01L 21/0272 (2013.01); H01L 21/31116 (2013.01); H01L 21/32135 (2013.01); H01L 21/32139 (2013.01); H01L 27/12 (2013.01); H01L 27/1262 (2013.01); H01L 51/00 (2013.01); H01L 51/5253 (2013.01); H01L 2227/323 (2013.01);
Abstract
A method of manufacturing a backplane for a display device includes forming an insulation layer on a substrate, forming a pad electrode layer on the insulation layer, forming a photoresist pattern on the pad electrode layer in the pad region, etching the pad electrode layer and a portion of the insulation layer by the photoresist pattern as an etch-stop layer so as to simultaneously form a pad electrode and a side protection layer, the side protection layer covering a sidewall of the pad electrode, and stripping the photoresist pattern.