The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2021
Filed:
Apr. 04, 2018
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Keisuke Matsushima, Tokyo, JP;
Tsutomu Karimata, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01F 7/06 (2006.01); H01F 41/04 (2006.01); H01F 7/20 (2006.01); H01F 27/28 (2006.01); H01J 37/147 (2006.01); H01F 41/06 (2016.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01F 41/04 (2013.01); H01F 7/20 (2013.01); H01F 27/28 (2013.01); H01F 41/06 (2013.01); H01J 37/1472 (2013.01); H01J 37/28 (2013.01); H01J 2237/152 (2013.01);
Abstract
A coil-integrated-type yoke for realizing a deflector that can accurately deflect an orbit of an electron beam and a manufacturing method thereof are provided. There is provided a manufacturing method of a coil-integrated-type yoke, the manufacturing method including: a step of sequentially inserting a molding agent, a coil, and a spacer into a groove heading from a first surface toward a second surface of the yoke; and a step of polishing the first surface of the yoke and the spacer together.