The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 26, 2021

Filed:

May. 12, 2020
Applicant:

Changxin Memory Technologies, Inc., Anhui, CN;

Inventors:

Rongfu Zhu, Hefei, CN;

Dingyou Lin, Hefei, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01); G11C 5/06 (2006.01); H01L 29/06 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 27/10826 (2013.01); G11C 5/063 (2013.01); H01L 27/10879 (2013.01); H01L 27/10891 (2013.01); H01L 29/0649 (2013.01); H01L 29/66795 (2013.01); H01L 29/7853 (2013.01);
Abstract

An asymmetric fin field-effect transistor (FinFET) in a memory device, a method for fabricating the FinFET and a semiconductor device are disclosed. In the provided FinFET and method, each of the active areas comprises a fin, a length of a first end of the fin on a first side of the active area and covered by the word line being different from a length of a second end of the fin on a second side of the active area and covered by the word line. For this reason, the present invention allows reduced process difficulty. In addition, the different lengths of the word lines can induce a weaker unidirectional electric field which suffers from much less current leakage, compared to a bidirectional electric field created in word lines with equal such length.


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