The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2021
Filed:
Jun. 05, 2018
Macom Technology Solutions Holdings, Inc., Lowell, MA (US);
Gabriel R. Cueva, Bedford, NH (US);
Timothy E. Boles, Tyngsboro, MA (US);
Wayne Mack Struble, Franklin, MA (US);
MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC., Lowell, MA (US);
Abstract
A method for making a semiconductor structure includes defining one or more device areas and one or more interconnect areas on a silicon substrate, forming trenches in the interconnect areas of the silicon substrate, oxidizing the silicon substrate in the trenches to form silicon dioxide regions, forming a III-nitride material layer on the surface of the silicon substrate, forming devices in the device areas of the gallium nitride layer, and forming interconnects in the interconnect areas. The silicon dioxide regions reduce parasitic capacitance between the interconnects and ground.