The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2021
Filed:
May. 30, 2018
Oerlikon Surface Solutions Ag, Pfäffikon, Pfäffikon, CH;
Joerg Kerschbaumer, Feldkirch, AT;
Hamid Bolvardi, Chur, CH;
Siegfried Krassnitzer, Feldkirch, AT;
Markus Esselbach, Feldkirch, AT;
Oerlikon Surface Solutions AG, Pfäffikon, Pfäffikon, CH;
Abstract
The present invention discloses a target assembly which allows safe, fracture-free and economic operation of target materials with low fracture toughness and/or bending strength during arc evaporation processes as well as in sputtering processes. The present invention discloses a target assembly for PVD processes, comprising a target, and a target holding device (), characterized in that the target () comprises a first bayonet lock and the target holding device () comprises a counterbody for the first bayonet lock of the target and a second bayonet lock for engaging the target assembly in the cooling means of the deposition chamber.