The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2021
Filed:
Jul. 16, 2019
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Johannes Petrus Martinus Bernardus Vermeulen, Leende, NL;
Luc Leonardus Adrianus Martinus Meulendijks, Helmond, NL;
Antonius Franciscus Johannes De Groot, Lierop, NL;
Johannes Adrianus Cornelis Maria Pijnenburg, Moergestel, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70725 (2013.01); G03F 7/70775 (2013.01);
Abstract
The invention provides a substrate support for supporting a substrate, comprising:
Vermeulen, Johannes Petrus Martinus Bernardus. (2021). Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing method (U.S. Patent No. 11156924). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11156924
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile