The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 26, 2021

Filed:

Jun. 17, 2020
Applicant:

Bruker Nano Gmbh, Berlin, DE;

Inventors:

Detlef Knebel, Berlin, DE;

Tilo Jankowski, Berlin, DE;

Frederik Büchau, Berlin, DE;

Assignee:

Bruker Nano GmbH, Berlin, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 10/04 (2010.01); G01Q 10/06 (2010.01);
U.S. Cl.
CPC ...
G01Q 10/045 (2013.01); G01Q 10/065 (2013.01);
Abstract

A measuring device for a scanning probe microscope including a sample receptacle configured to receive a sample; a measuring probe which is arranged on a probe holder and has a probe tip; a displacement device which moves the measuring probe and the sample receptacle relative to each other; a control device which is connected to the displacement device and controls the relative movement between the measuring probe and the sample receptacle; and a sensor device which is configured to detect, movement measurement signals during an absolute measurement for a movement of the measuring probe and/or a movement of the sample receptacle. The movement measurement signals are relayed to the control device. The control device is configured to control the relative movement. The invention also provides a scanning probe microscope, as well as a method for examining a sample.


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