The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 19, 2021

Filed:

Jun. 03, 2019
Applicant:

Qorvo Us, Inc., Greensboro, NC (US);

Inventors:

Yongjie Cui, Plano, TX (US);

Xing Gu, Allen, TX (US);

Andrew Arthur Ketterson, Dallas, TX (US);

Cathy Lee, Plano, TX (US);

Xing Chen, Sunnyvale, CA (US);

Assignee:

Qorvo US, Inc., Greensboro, NC (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01P 1/383 (2006.01); H01L 21/306 (2006.01); H01L 27/06 (2006.01); H01L 23/528 (2006.01); H01L 23/66 (2006.01); H01L 21/8252 (2006.01); H01L 21/3205 (2006.01); H01P 11/00 (2006.01); H01L 21/02 (2006.01); H01L 29/20 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01P 1/383 (2013.01); H01L 21/0254 (2013.01); H01L 21/02378 (2013.01); H01L 21/30604 (2013.01); H01L 21/32051 (2013.01); H01L 21/6835 (2013.01); H01L 21/8252 (2013.01); H01L 23/528 (2013.01); H01L 23/66 (2013.01); H01L 27/0605 (2013.01); H01L 29/2003 (2013.01); H01L 2221/6835 (2013.01); H01L 2221/68359 (2013.01); H01L 2223/6605 (2013.01); H01P 11/00 (2013.01);
Abstract

Integration of self-biased magnetic circulators with microwave devices is disclosed herein. In microwave and other high-frequency radio frequency (RF) applications, a magnetic circulator can be implemented with a smaller permanent magnet. Aspects disclosed herein include a process flow for producing a self-biased circulator in an integrated circuit chip. In this regard, a magnetic circulator junction can be fabricated on an active layer of a semiconductor wafer. A deep pocket or cavity is formed in an insulating substrate under the active layer. This cavity is then filled with a ferromagnetic material such that the circulator junction is self-biased within the integrated circuit chip, eliminating the need for an external magnet. The self-biased circulator provides high isolation between ports in a smaller integrated circuit.


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