The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 19, 2021

Filed:

Apr. 21, 2020
Applicant:

Vanguard International Semiconductor Corporation, Hsinchu, TW;

Inventor:

Shin-Cheng Lin, Tainan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/095 (2006.01); H01L 29/417 (2006.01); H01L 29/47 (2006.01); H01L 21/02 (2006.01); H01L 21/8252 (2006.01); H01L 29/45 (2006.01); H01L 29/778 (2006.01); H01L 21/027 (2006.01); H01L 21/306 (2006.01); H01L 29/26 (2006.01); H01L 21/67 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 27/095 (2013.01); H01L 21/0274 (2013.01); H01L 21/02538 (2013.01); H01L 21/30612 (2013.01); H01L 21/67069 (2013.01); H01L 21/8252 (2013.01); H01L 29/26 (2013.01); H01L 29/41775 (2013.01); H01L 29/452 (2013.01); H01L 29/475 (2013.01); H01L 29/66462 (2013.01); H01L 29/778 (2013.01);
Abstract

A semiconductor structure includes a substrate having a first region and a second region, an epitaxial layer above the substrate, a first device on the first region, a second device on the second region and an isolation structure on the substrate. The first device includes a first gate electrode, a first source electrode and a first drain electrode disposed at two opposite sides of the first gate electrode. A dielectric layer disposed on the epitaxial layer covers the first gate electrode. The second device includes a second gate electrode disposed on the dielectric layer, second source and drain electrodes disposed at two opposite sides of the second gate electrode. The second source electrode is electrically connected to the first drain electrode. Also, the portions of the epitaxial layer respectively disposed in the first and second regions are isolated from each other by the isolation structure.


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