The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2021
Filed:
Aug. 30, 2019
Screen Holdings Co., Ltd., Kyoto, JP;
Joji Kuwahara, Kyoto, JP;
Seiji Murai, Kyoto, JP;
Abstract
A second substrate transportation mechanism is generally set to transport a substrate from a substrate buffer unit to a FOUP placed on an opener. However, if a predetermined condition is satisfied, the second substrate transportation mechanism transports a substrate from the FOUP to the substrate buffer unit. That is, the second substrate transportation mechanism performs an operation different from an ordinary substrate transportation operation. Accordingly, a FOUP transportation mechanism can leave a specific FOUP at a placement position (opener) of the specific FOUP from when all the substrates are taken from the specific FOUP to when all the treated substrates are accommodated in the specific FOUP. Thus, the FOUP transportation mechanism can transport FOUPs except for the specific FOUP so that FOUP transportation efficiency can be enhanced.