The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2021
Filed:
Feb. 22, 2018
Asml Netherlands B.v., Veldhoven, NL;
Jelle Nije, Leerdam, NL;
Alexander Ypma, Veldhoven, NL;
Dimitra Gkorou, Eindhoven, NL;
Georgios Tsirogiannis, Eindhoven, NL;
Robert Jan Van Wijk, Valkenswaard, NL;
Tzu-Chao Chen, San Jose, CA (US);
Frans Reinier Spiering, Arnhem, NL;
Sarathi Roy, Eindhoven, NL;
Cédric Désiré Grouwstra, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method of optimizing an apparatus for multi-stage processing of product units such as wafers, the method includes: receiving object data representing one or more parameters measured across the product units and associated with different stages of processing of the product units; and determining fingerprints of variation of the object data across the product units, the fingerprints being associated with different respective stages of processing of the product units. The fingerprints may be determined by decomposing the object data into components using principal component analysis for each different respective stage; analyzing commonality of the fingerprints through the different stages to produce commonality results; and optimizing an apparatus for processing product units based on the commonality results.