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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11149231 B1

PDFFull Text
Date of Patent:
Oct. 19, 2021

Filed:

Mar. 31, 2020

Cleaning liquid, cleaning method, and method for producing semiconductor wafer

Applicant:

Mitsubishi Chemical Corporation, Chiyoda-ku, JP;

Inventors:

Ken Harada, Tokyo, JP;

Yutaro Takeshita, Tokyo, JP;

Toshiaki Shibata, Tokyo, JP;

Kan Takeshita, Tokyo, JP;

Assignee:

Mitsubishi Chemical Corporation, Chiyoda-ku, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Gregory E Webb

Int. Cl.
CPC ...
C11D 7/32 (2006.01); C11D 1/34 (2006.01); C11D 1/06 (2006.01); C11D 3/00 (2006.01); C11D 3/20 (2006.01); C11D 3/30 (2006.01); C11D 3/33 (2006.01); C11D 3/39 (2006.01); C11D 11/00 (2006.01);
U.S. Cl.
CPC ...
C11D 1/345 (2013.01); C11D 1/06 (2013.01); C11D 3/0047 (2013.01); C11D 3/2082 (2013.01); C11D 3/30 (2013.01); C11D 3/33 (2013.01); C11D 3/3942 (2013.01); C11D 11/0047 (2013.01);
Abstract

A cleaning liquid containing at least one surfactant (A) selected from the group consisting of a polyoxyalkylene alkyl ether phosphoric acid, a polyoxyalkylene alkyl ether acetic acid and a polyoxyalkylene alkyl ether sulfonic acid and a chelating agent (C), which has a pH of 8 or more, and a cleaning liquid containing an oxidizing agent (B) and a chelating agent (C), which has a pH of 8 or more.

Find Patent Forward Citations

Harada, Ken. (2021). Cleaning liquid, cleaning method, and method for producing semiconductor wafer (U.S. Patent No. 11149231). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11149231

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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