The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 12, 2021

Filed:

Oct. 02, 2018
Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Akiko Kigawa, Tokyo, JP;

Shinichi Fujisawa, Tokyo, JP;

Masayuki Matsubara, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/67 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6836 (2013.01); H01L 21/67132 (2013.01); H01L 21/67253 (2013.01); H01L 22/12 (2013.01); H01L 21/67092 (2013.01); H01L 2221/68336 (2013.01);
Abstract

A method of expanding a sheet includes the steps of gripping the sheet with a first gripping unit and a second griping unit and gripping the sheet with a third gripping unit and a fourth gripping unit, and expanding the sheet by moving the first gripping unit and the second griping unit away from each other in first directions relatively and moving the third gripping unit and the fourth gripping unit away from each other in second directions relatively. In the step of expanding the sheet, the states of the sheet that is under tension are detected, and movement of the first gripping unit, the second griping unit, the third gripping unit, and the fourth gripping unit is controlled based on the detected states of the sheet.


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