The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2021
Filed:
Oct. 08, 2019
Taiwan Semiconductor Manufacturing Co., Ltd, Hsinchu, TW;
Wei-Yu Lai, Hsinchu, TW;
Hung-Wen Chen, Hsinchu, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD, Hsinchu, TW;
Abstract
A method for transporting a cassette pod for containing semiconductor wafers is provided. The method includes transporting a cassette pod configured to receive a semiconductor wafer with a transporting apparatus. The method further includes supplying a gas from a cylinder into a housing of the cassette pod. The cylinder is externally positioned on the housing. The method also includes detecting a gas pressure in the cylinder with a detection element. In addition, the method includes issuing a signal to the transporting apparatus when the gas pressure in the cylinder is lower than a predetermined limit.