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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11133203 B1

PDFFull Text
Date of Patent:
Sep. 28, 2021

Filed:

Mar. 28, 2019

Plasma processing apparatus

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Satoshi Suzuki, Miyagi, JP;

Akira Ishikawa, Miyagi, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:

Pearne & Gordon LLP

Primary Examiner:

Karla A Moore

Assistant Examiner:

Tiffany Z Nuckols

Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); H01L 21/3065 (2006.01); H01J 37/20 (2006.01); C23C 16/458 (2006.01); H01J 37/32 (2006.01); C23C 14/54 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67109 (2013.01); C23C 14/541 (2013.01); C23C 16/4586 (2013.01); H01J 37/20 (2013.01); H01J 37/32724 (2013.01); H01L 21/3065 (2013.01); H01L 21/67063 (2013.01); H01L 21/6833 (2013.01); H01L 21/6838 (2013.01); H01L 21/68785 (2013.01); H01J 2237/2001 (2013.01);
Abstract

Temperature uniformity in a mounting surface of a mounting table is improved. A plasma processing apparatus includes the mounting table having thereon the mounting surface on which a work-piece serving as a plasma processing target is mounted; a coolant path formed within the mounting table along the mounting surface of the mounting table; and an inlet path connected to the coolant path from a backside of the mounting surface of the mounting table and configured to introduce a coolant into the coolant path. The inlet path is extended from the backside of the mounting surface of the mounting table such that an extension direction of the inlet path is inclined at an angle greater than 90° with respect to a flow direction of the coolant flowing through the coolant path, and then, connected to the coolant path.

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