The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2021
Filed:
Jan. 24, 2019
Applicant:
Disco Corporation, Tokyo, JP;
Inventor:
Nobuyasu Kitahara, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/033 (2006.01); H01L 21/02 (2006.01); H01L 21/027 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0337 (2013.01); H01L 21/02057 (2013.01); H01L 21/0275 (2013.01); H01L 21/6704 (2013.01); H01L 21/67075 (2013.01); H01L 21/6833 (2013.01); H01L 21/6836 (2013.01);
Abstract
There is provided a processing method of a workpiece. In the processing method, a protective film including a water-insoluble resin is formed on the front surface of a workpiece and the workpiece on which the protective film is formed is processed. Furthermore, the protective film is deteriorated by supplying an organic solvent to the workpiece processed and the protective film is removed from the front surface of the workpiece by supplying cleaning water to the protective film deteriorated.