The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2021
Filed:
Aug. 24, 2018
Applicant:
Hitachi High-technologies Corporation, Tokyo, JP;
Inventors:
Toshiyuki Yokosuka, Tokyo, JP;
Hajime Kawano, Tokyo, JP;
Kouichi Kurosawa, Tokyo, JP;
Hideyuki Kazumi, Tokyo, JP;
Chahn Lee, Tokyo, JP;
Assignee:
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/05 (2006.01); H01J 37/28 (2006.01); H01J 37/22 (2006.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
H01J 37/05 (2013.01); H01J 37/222 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 2237/2817 (2013.01);
Abstract
The purpose of the present invention is to provide a charged particle ray device which is capable of simply estimating the cross-sectional shape of a pattern. The charged particle ray device according to the present invention acquires a detection signal for each different discrimination condition of an energy discriminator, and estimates the cross-sectional shape of a sample by comparing the detection signal for each discrimination condition with a reference pattern (see FIG.).