The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2021
Filed:
Nov. 30, 2016
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Kartik Ramaswamy, San Jose, CA (US);
Chunlei Zhang, Saratoga, CA (US);
Haitao Wang, Sunnyvale, CA (US);
Vijay D. Parkhe, San Jose, CA (US);
Jaeyong Cho, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/687 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); H01J 37/32082 (2013.01); H01J 37/32706 (2013.01); H01J 37/32715 (2013.01); H01L 21/68735 (2013.01); H01J 2237/334 (2013.01);
Abstract
A workpiece carrier suitable for high power processes is described. It may include a puck to carry the workpiece, a plate bonded to the puck by an adhesive, a mounting ring surrounding the puck and the cooling plate, and a gasket between the mounting ring and the plate, the gasket configured to protect the adhesive.