The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2021
Filed:
May. 09, 2019
Tokyo Electron Limited, Tokyo, JP;
Atsushi Kawabe, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A substrate transfer method includes: acquiring sensing information from a sensor by moving a substrate by a robot arm such that the substrate passes through a sensing region; calculating a center position of the substrate with respect to the robot arm based on the sensing information; detecting a marker indicating a reference direction of the substrate by the sensor by controlling the robot arm to rotate the substrate about the center position in a state where an edge of the substrate is located in the sensing region; calculating a direction of the substrate with respect to the robot arm based on a position of the marker; calculating a correction amount based on the center position and the direction of the substrate; and placing the substrate on the stage in the processing chamber such that the center position and the direction of the substrate are corrected according to the correction amount.