The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2021
Filed:
Dec. 14, 2018
Research & Business Foundation Sungkyunkwan University, Suwon-si, KR;
Geun Young Yeom, Seoul, KR;
Ki Hyun Kim, Daejeon, KR;
Ki Seok Kim, Incheon, KR;
You Jin Ji, Gunpo-si, KR;
Jin Woo Park, Goyang-si, KR;
Doo San Kim, Suncheon-si, KR;
Won Oh Lee, Hwaseong-si, KR;
Chang Hoon Song, Sangju-si, KR;
Ji Young Byun, Suwon-si, KR;
Ji Soo Oh, Suwon-si, KR;
Hyun Woo Tak, Yongin-si, KR;
Research and Business Foundation Sungkyunkwan University, Suwon-si, KR;
Abstract
A plasma source device includes a pair of divided electrodes including a first divided electrode and a second divided electrode spaced apart from each other and electrically coupled to each other; and a ferrite structure comprising a portion interposed the first divided electrode and the second divided electrode.