The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2021
Filed:
Jul. 10, 2020
Applicant:
D2s, Inc., San Jose, CA (US);
Inventor:
Harold Robert Zable, Palo Alto, CA (US);
Assignee:
D2S, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 1/78 (2012.01); H01J 37/317 (2006.01); H01J 37/302 (2006.01);
U.S. Cl.
CPC ...
G03F 7/2026 (2013.01); G03F 1/78 (2013.01); G03F 7/70441 (2013.01); G03F 7/70616 (2013.01); H01J 37/3026 (2013.01); H01J 37/3177 (2013.01); H01J 2237/30461 (2013.01); H01J 2237/31754 (2013.01); H01J 2237/31769 (2013.01);
Abstract
Methods include inputting an array of pixels, where each pixel in the array of pixels has a pixel dose. The array of pixels represents dosage on a surface to be exposed with a plurality of patterns, each pattern of the plurality of patterns having an edge. A target bias is input. An edge of a pattern in the plurality of patterns is identified. For each pixel which is in a neighborhood of the identified edge, a calculated pixel dose is calculated such that the identified edge is relocated by the target bias. The array of pixels with the calculated pixel doses is output. Systems for performing the methods are also disclosed.