The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2021
Filed:
Sep. 01, 2020
Applicant:
Kioxia Corporation, Tokyo, JP;
Inventors:
See Kei Lee, Kawasaki Kanagawa, JP;
Mitsuo Koike, Yokohama Kanagawa, JP;
Masumi Saitoh, Yokohama Kanagawa, JP;
Assignee:
Kioxia Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 70/14 (2010.01); G01Q 60/58 (2010.01); G01Q 70/16 (2010.01);
U.S. Cl.
CPC ...
G01Q 70/14 (2013.01); G01Q 60/58 (2013.01); G01Q 70/16 (2013.01);
Abstract
A manufacturing method of a probe according to the present embodiment is used to manufacture a probe for a scanning probe microscope. An insulating film is formed on the surface of a probe provided on a base. Metal ions are implanted into the insulating film. An electric field is applied to the insulating film to concentrate the metal ions in the insulating film at a tip of the probe and form a metallic filament in the insulating film.