The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2021
Filed:
Dec. 27, 2018
Asml Netherlands B.v., Veldhoven, NL;
Tim Peter Johan Gerard Maas, Heythuysen, NL;
Bartolomeus Martinus Johannes Van Hout, Eindhoven, NL;
Henricus Wilhelmus Maria Van Buel, 's-Hertogenbosch, NL;
Floris Zoethout, Gendt, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An apparatus () for removing contaminant particles () from a component () of an apparatus (, MT), the contaminant particles giving rise to an ambient electric field (E), the apparatus comprising: a collection region () for attracting the particles, wherein the ambient electric field is at least between the component and the collection region; and an electric field generator configured to establish an applied electric field between the collection region and the component to cause the particles to be transported from the component to the collection region, wherein the electric field generator is configured to determine the polarity of the applied electric field based on the ambient electric field.