Field plate structures with patterned surface passivation layers and methods for manufacturing thereof

Abstract

A gallium nitride (GaN) transistor which includes multiple insulator semiconductor interface regions. Two or more first insulator segments and two or more second insulator segments are positioned between the gate and drain contacts and interleaved together. At least one first insulator segment is nearer to the gate contact than the second insulator segments. At least one second insulator segment is nearer to the drain contact than the first insulator segments. The first and second insulators are chosen such that a net electron donor density above the channel under the first insulator segments is lower than a net electron density above the channel under the second insulator segments. The first insulator segments reduce gate leakage and electric fields near the gate that cause high gate-drain charge. The second insulator segments reduce electric fields near the drain contact and provide a high density of charge in the channel for reduced on-resistance.