The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 14, 2021

Filed:

Dec. 06, 2018
Applicant:

Sandisk Technologies Llc, Addison, TX (US);

Inventors:

Hiroyuki Tanaka, Yokkaichi, JP;

Sayako Nagamine, Yokkaichi, JP;

Akihisa Sai, Yokkaichi, JP;

Assignee:

SANDISK TECHNOLOGIES LLC, Addison, TX (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11582 (2017.01); H01L 29/06 (2006.01); H01L 27/11524 (2017.01); H01L 27/1157 (2017.01); H01L 29/423 (2006.01); H01L 27/11556 (2017.01); H01L 21/28 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 27/1157 (2013.01); H01L 27/11524 (2013.01); H01L 27/11556 (2013.01); H01L 29/0649 (2013.01); H01L 29/40117 (2019.08); H01L 29/4234 (2013.01); H01L 21/0217 (2013.01); H01L 21/0228 (2013.01); H01L 21/02271 (2013.01);
Abstract

An alternating stack of insulating layers and word-line-level spacer material layers is formed over a substrate. Memory opening fill structures including a respective memory film, a respective word-line-level semiconductor channel portion, a respective word-line-level dielectric core laterally, and a respective sacrificial dielectric material portion are formed through the alternating stack. Drain-select-level material layers are formed over the alternating stack and the memory opening fill structures. Drain-select-level openings are formed through the drain-select-level material layers and over the memory opening fill structures. The sacrificial dielectric material portions are removed selective to the word-line-level semiconductor channel portions underneath the drain-select-level openings. Drain-select-level semiconductor channel portions are formed directly on a respective one of the word-line-level semiconductor channel portions.


Find Patent Forward Citations

Loading…