The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 14, 2021

Filed:

Aug. 12, 2018
Applicant:

Monolithic 3d Inc., San Jose, CA (US);

Inventors:

Zvi Or-Bach, San Jose, CA (US);

Brian Cronquist, San Jose, CA (US);

Deepak C. Sekar, San Jose, CA (US);

Zeev Wurman, Palo Alto, CA (US);

Assignee:

MONOLITHIC 3D INC., Klamath Falls, OR (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11521 (2017.01); H01L 27/11524 (2017.01); H01L 27/11529 (2017.01); H01L 27/11551 (2017.01); H01L 27/11578 (2017.01); H01L 21/683 (2006.01); G11C 8/16 (2006.01); H01L 29/792 (2006.01); H01L 29/788 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 29/423 (2006.01); H01L 27/12 (2006.01); H01L 27/118 (2006.01); H01L 27/11573 (2017.01); H01L 27/11526 (2017.01); H01L 27/112 (2006.01); H01L 27/11 (2006.01); H01L 27/108 (2006.01); H01L 27/105 (2006.01); H01L 27/10 (2006.01); H01L 27/092 (2006.01); H01L 27/06 (2006.01); H01L 27/02 (2006.01); H01L 23/525 (2006.01); H01L 23/48 (2006.01); H01L 21/84 (2006.01); H01L 21/8238 (2006.01); H01L 21/822 (2006.01); H01L 21/768 (2006.01); H01L 21/762 (2006.01); H01L 21/74 (2006.01); H01L 49/02 (2006.01); H01L 27/088 (2006.01); H01L 29/732 (2006.01); H01L 29/737 (2006.01); H01L 21/8234 (2006.01); H01L 29/786 (2006.01); H01L 29/06 (2006.01); H01L 29/775 (2006.01); H01L 23/00 (2006.01); H01L 25/00 (2006.01); H01L 25/065 (2006.01); H01L 23/367 (2006.01); H01L 23/544 (2006.01); H01L 27/24 (2006.01); H01L 45/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6835 (2013.01); G11C 8/16 (2013.01); H01L 21/743 (2013.01); H01L 21/76254 (2013.01); H01L 21/76898 (2013.01); H01L 21/8221 (2013.01); H01L 21/823475 (2013.01); H01L 21/823828 (2013.01); H01L 21/84 (2013.01); H01L 23/481 (2013.01); H01L 23/5252 (2013.01); H01L 27/0207 (2013.01); H01L 27/0688 (2013.01); H01L 27/088 (2013.01); H01L 27/092 (2013.01); H01L 27/10 (2013.01); H01L 27/105 (2013.01); H01L 27/10802 (2013.01); H01L 27/10876 (2013.01); H01L 27/10894 (2013.01); H01L 27/10897 (2013.01); H01L 27/11 (2013.01); H01L 27/112 (2013.01); H01L 27/1108 (2013.01); H01L 27/11526 (2013.01); H01L 27/11529 (2013.01); H01L 27/11551 (2013.01); H01L 27/11573 (2013.01); H01L 27/11578 (2013.01); H01L 27/11807 (2013.01); H01L 27/11898 (2013.01); H01L 27/1203 (2013.01); H01L 27/1207 (2013.01); H01L 28/00 (2013.01); H01L 29/0673 (2013.01); H01L 29/4236 (2013.01); H01L 29/42392 (2013.01); H01L 29/66272 (2013.01); H01L 29/66439 (2013.01); H01L 29/66621 (2013.01); H01L 29/66825 (2013.01); H01L 29/66833 (2013.01); H01L 29/66901 (2013.01); H01L 29/732 (2013.01); H01L 29/7371 (2013.01); H01L 29/775 (2013.01); H01L 29/78 (2013.01); H01L 29/785 (2013.01); H01L 29/7841 (2013.01); H01L 29/7843 (2013.01); H01L 29/7855 (2013.01); H01L 29/7881 (2013.01); H01L 29/78696 (2013.01); H01L 29/792 (2013.01); H01L 23/3677 (2013.01); H01L 23/544 (2013.01); H01L 24/13 (2013.01); H01L 24/16 (2013.01); H01L 25/0655 (2013.01); H01L 25/0657 (2013.01); H01L 25/50 (2013.01); H01L 27/10873 (2013.01); H01L 27/11206 (2013.01); H01L 27/1214 (2013.01); H01L 27/1266 (2013.01); H01L 27/249 (2013.01); H01L 27/2436 (2013.01); H01L 29/66545 (2013.01); H01L 45/04 (2013.01); H01L 45/1226 (2013.01); H01L 45/146 (2013.01); H01L 2221/68368 (2013.01); H01L 2223/5442 (2013.01); H01L 2223/54426 (2013.01); H01L 2223/54453 (2013.01); H01L 2224/131 (2013.01); H01L 2224/16145 (2013.01); H01L 2224/16146 (2013.01); H01L 2224/16225 (2013.01); H01L 2224/16227 (2013.01); H01L 2224/16235 (2013.01); H01L 2224/32145 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/45124 (2013.01); H01L 2224/45147 (2013.01); H01L 2224/73204 (2013.01); H01L 2224/73253 (2013.01); H01L 2224/73265 (2013.01); H01L 2224/80001 (2013.01); H01L 2224/81005 (2013.01); H01L 2224/83894 (2013.01); H01L 2225/06513 (2013.01); H01L 2225/06541 (2013.01); H01L 2225/06558 (2013.01); H01L 2924/00 (2013.01); H01L 2924/00011 (2013.01); H01L 2924/00012 (2013.01); H01L 2924/00014 (2013.01); H01L 2924/00015 (2013.01); H01L 2924/01002 (2013.01); H01L 2924/01004 (2013.01); H01L 2924/014 (2013.01); H01L 2924/01013 (2013.01); H01L 2924/01018 (2013.01); H01L 2924/01019 (2013.01); H01L 2924/01029 (2013.01); H01L 2924/01046 (2013.01); H01L 2924/01066 (2013.01); H01L 2924/01068 (2013.01); H01L 2924/01077 (2013.01); H01L 2924/01078 (2013.01); H01L 2924/01322 (2013.01); H01L 2924/10253 (2013.01); H01L 2924/10329 (2013.01); H01L 2924/12032 (2013.01); H01L 2924/12033 (2013.01); H01L 2924/12036 (2013.01); H01L 2924/12042 (2013.01); H01L 2924/1301 (2013.01); H01L 2924/1305 (2013.01); H01L 2924/13062 (2013.01); H01L 2924/13091 (2013.01); H01L 2924/14 (2013.01); H01L 2924/1431 (2013.01); H01L 2924/1434 (2013.01); H01L 2924/1461 (2013.01); H01L 2924/1579 (2013.01); H01L 2924/15311 (2013.01); H01L 2924/16152 (2013.01); H01L 2924/181 (2013.01); H01L 2924/19041 (2013.01); H01L 2924/3011 (2013.01); H01L 2924/3025 (2013.01); H01L 2924/30105 (2013.01);
Abstract

A 3D semiconductor device, including: a first level including a single crystal layer, a plurality of first transistors, and a first metal layer, forming memory control circuits; a second level overlaying the single crystal layer, and including a plurality of second transistors and a plurality of first memory cells; a third level overlaying the second level, and including a plurality of third transistors and a plurality of second memory cells; where the second transistors are aligned to the first transistors with less than 40 nm alignment error, where the memory cells include a NAND non-volatile memory type, where some of the memory control circuits can control at least one of the memory cells, and where some of the memory control circuits are designed to perform a verify read after a write pulse so to detect if the at least one of the memory cells has been successfully written.


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