The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2021
Filed:
Jun. 30, 2017
Shanghai Ic R&d Center Co., Ltd., Shanghai, CN;
Xiaoxu Kang, Shanghai, CN;
Shaohai Zeng, Shanghai, CN;
SHANGHAI IC R&D CENTER CO., LTD, Shanghai, CN;
Abstract
The invention provided an ion implantation system. The ion implantation system comprises an ion emitting device and a target plate device; the target plate device comprises a graphite electrode unit and a power supply unit; the graphite electrode unit is mounted on the lower end of a support frame, and the graphite electrode unit is a hollow structure; the graphite electrode unit comprises a graphite electrode and a hollow region I, the graphite electrode is connected to the power supply unit; the area of the hollow region I is smaller than that of the wafer to be processed, and the sum of the area of the graphite electrode and the area of the hollow region I is larger than an implantation area of the ion beam. When the ion beam is implanted to the wafer to be processed on a target plate for ion implantation, the power supply unit applies a voltage to the graphite electrode to generate an electric field in the opposite direction from the electric field generated by the ion beam motion, accordingly, the speed of the ion beam implanted to a location outside the wafer to be processed is reduced, and secondary contamination during ion implantation is avoided, so as to perform an ion implantation process more efficiently.