The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2021
Filed:
Nov. 22, 2016
Hitachi High-technologies Corporation, Tokyo, JP;
Kunji Shigeto, Tokyo, JP;
Mitsugu Yamashita, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
In the case of an in situ observation with a charged particle beam apparatus, an observer who is not an expert in the charged particle beam apparatus needs to maintain the field of view of the observation that changes from moment to moment while watching a monitor, and thus, adjustment of the field of view needs to be controllable in real time with a good operability. In order to eliminate the need for an observer to move the line of sight, a live image and a comparison image are overlapped and displayed. At this time, an interface is devised, such that overlapping of two images can be executed without giving stress to the observer. The observer presses a button on an operation screen, thereby displaying a superimposed image, which is obtained by making the comparison image matching the size of a first display area configured to display the live image translucent and superimposing the translucent comparison image on the live image, at the position of the first display area of the image display device.