The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2021
Filed:
Feb. 07, 2019
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Gunar Lorenz, Munich, DE;
Alfons Dehe, Villingen Schwenningen, DE;
Marc Fueldner, Neubiberg, DE;
Bernd Goller, Otterfing, DE;
Ulrich Krumbein, Rosenheim, DE;
Andreas Wiesbauer, Poertschach, AT;
Assignee:
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); B81B 7/00 (2006.01); B81B 3/00 (2006.01); B81B 7/02 (2006.01); H04R 19/04 (2006.01); H04R 1/02 (2006.01); G01L 9/00 (2006.01); H04R 19/00 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0064 (2013.01); B81B 3/00 (2013.01); B81B 3/0018 (2013.01); B81B 7/008 (2013.01); B81B 7/02 (2013.01); G01L 9/00 (2013.01); H04R 1/023 (2013.01); H04R 19/04 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/04 (2013.01); B81B 2207/091 (2013.01); B81B 2207/11 (2013.01); H04R 19/005 (2013.01); H04R 2201/003 (2013.01);
Abstract
A MEMS sensor includes a housing with an interior volume, wherein the housing has an access port to the interior volume, a MEMS component in the housing, and a protection structure, which reduces an introduction of electromagnetic disturbance radiation with a wavelength in the range between 10 nm and 20 μm into the interior volume through the access port and reduces a propagation of the electromagnetic disturbance radiation in the interior volume.