The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 07, 2021

Filed:

Jun. 19, 2020
Applicant:

University of Electronic Science and Technology of China, Chengdu, CN;

Inventors:

Jie Xiong, Chengdu, CN;

Chuanhui Gong, Chengdu, CN;

Yang Wang, Chengdu, CN;

Gaofeng Rao, Chengdu, CN;

Chujun Yin, Chengdu, CN;

Chaoyi Yan, Chengdu, CN;

Junwei Chu, Chengdu, CN;

Jianwen Huang, Chengdu, CN;

Miao Zhang, Chengdu, CN;

Xinrui Chen, Chengdu, CN;

Yuqing Liu, Chengdu, CN;

Chunyang Wu, Chengdu, CN;

Xianfu Wang, Chengdu, CN;

Liping Dai, Chengdu, CN;

Wanli Zhang, Chengdu, CN;

Yanrong Li, Chengdu, CN;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/18 (2006.01); C23C 14/18 (2006.01); C23C 14/24 (2006.01); C23C 14/04 (2006.01); H01L 31/09 (2006.01); C30B 29/12 (2006.01); C30B 29/64 (2006.01); H01L 31/0224 (2006.01); H01L 31/032 (2006.01); C30B 25/10 (2006.01);
U.S. Cl.
CPC ...
H01L 31/18 (2013.01); C23C 14/042 (2013.01); C23C 14/18 (2013.01); C23C 14/24 (2013.01); C30B 25/10 (2013.01); C30B 29/12 (2013.01); C30B 29/64 (2013.01); H01L 31/0224 (2013.01); H01L 31/032 (2013.01); H01L 31/09 (2013.01);
Abstract

A method for preparing an ultrathin two-dimensional (2D) monocrystalline nanosheet, the method including: 1) placing BiXpowder where X=I, Br, or Cl in a crucible, and putting the crucible on a first heating zone of a furnace disposed at a gas inlet of a quartz tube; placing substrates covered with metal sheets on a second heating zone of the furnace disposed at a gas outlet of the quartz tube; 2) vacuumizing the quartz tube; pumping Ar gas into the quartz tube until the air pressure is 101.325 kPa; pumping a carrier gas into the quartz tube; and 3) heating and maintaining the second heating zone; heating the first heating zone for BiXevaporation until producing chemical reaction between BiXand the metal sheets, and preparing ultrathin 2D nanosheets on the substrates simultaneously; and cooling the substrate naturally to 15-30° C.


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