The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2021
Filed:
Sep. 25, 2019
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Kun Liu, Portland, OR (US);
Erik Kieft, Eindhoven, NL;
Assignee:
FEI Company, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/16 (2006.01); H01J 37/04 (2006.01); H01J 37/073 (2006.01); H01J 37/09 (2006.01); H01J 37/10 (2006.01); H01J 37/21 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/165 (2013.01); H01J 37/045 (2013.01); H01J 37/073 (2013.01); H01J 37/09 (2013.01); H01J 37/10 (2013.01); H01J 37/21 (2013.01); H01J 37/26 (2013.01); H01J 2237/026 (2013.01); H01J 2237/043 (2013.01);
Abstract
Charged particle beams (CPBs) are modulated using a beam blanker/deflector and an electrically pulsed extraction electrode in conjunction with a field emitter and a gun lens. With such modulation, CPBs can provide both pulsed and continuous mode operation as required for a particular application, while average CPB current is maintained within predetermined levels, such as levels that promote X-ray safe operation. Either the extraction electrode or the beam blanker/deflector can define CPB pulse width, CPB on/off ratio, or both.