The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2021
Filed:
Mar. 22, 2019
Applicant:
Asml Netherlands B.v., AH Veldhoven, NL;
Inventors:
Thomas Jarik Huisman, Eindhoven, NL;
Ruben Cornelis Maas, Utrecht, NL;
Hermanus Adrianus Dillen, Maarheeze, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G03F 7/20 (2006.01); G01B 9/04 (2006.01); G03F 1/84 (2012.01); G06T 7/12 (2017.01); G03F 1/86 (2012.01);
U.S. Cl.
CPC ...
G03F 7/70625 (2013.01); G01B 9/04 (2013.01); G03F 1/84 (2013.01); G03F 1/86 (2013.01); G06T 7/12 (2017.01); G06T 2207/10061 (2013.01); G06T 2207/20168 (2013.01); G06T 2207/30148 (2013.01);
Abstract
Disclosed is a method of, and associated apparatus for, determining an edge position relating to an edge of a feature comprised within an image, such as a scanning electron microscope image, which comprises noise. The method comprises determining a reference signal from said image; and determining said edge position with respect to said reference signal. The reference signal may be determined from the image by applying a-dimensional low-pass filter to the image in a direction parallel to an initial contour estimating the edge position.