The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2021
Filed:
Aug. 26, 2019
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Boris Bittner, Roth, DE;
Norbert Wabra, Werneck, DE;
Holger Schmidt, Aalen, DE;
Ricarda Schoemer, Zusmarshausen, DE;
Sonja Schneider, Oberkochen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/08 (2006.01); G02B 7/18 (2021.01); G03F 7/20 (2006.01); G02B 27/00 (2006.01); G02B 5/30 (2006.01); G21K 1/06 (2006.01);
U.S. Cl.
CPC ...
G02B 5/0891 (2013.01); G02B 5/0816 (2013.01); G02B 5/3075 (2013.01); G02B 7/1815 (2013.01); G02B 27/0025 (2013.01); G03F 7/70266 (2013.01); G03F 7/70891 (2013.01); G03F 7/70958 (2013.01); G21K 1/067 (2013.01);
Abstract
The disclosure relates to an optical element, including: a substrate, a first coating, which is disposed on a first side of the substrate and is configured for reflecting radiation having a used wavelength (λ) in the EUV wavelength range, and a second coating, which is disposed on a second side of the substrate, for influencing heating radiation that is incident on the second side of the substrate. The disclosure also relates to an optical arrangement having at least one such optical element.