The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 07, 2021

Filed:

Nov. 30, 2017
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Sriskantharajah Thirunavukarasu, Singapore, SG;

Karthik Elumalai, Bangalore, IN;

Jen Sern Lew, Singapore, SG;

Mingwei Zhu, Sunnyvale, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/458 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); C23C 16/30 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4586 (2013.01); H01L 21/6831 (2013.01); H01L 21/68771 (2013.01); C23C 16/303 (2013.01);
Abstract

Embodiments of improved substrate carriers are provided herein. In some embodiments, a substrate carrier, includes: a multi-layered disk having upper and lower layers formed of a continuous material and an electrostatic electrode structure disposed therebetween, wherein the multi-layered disk is dimensioned and arranged so as to have a nominal dimension which exceeds a nominal dimension of a standard substrate size used in the manufacture of light emitting diode devices, and wherein the multi-layered disk is formed symmetrically about a central axis and defines a substantially planar upper surface.


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