The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2021
Filed:
Oct. 11, 2016
Applicants:
Sciocs Company Limited, Ibaraki, JP;
Sumitomo Chemical Company, Limited, Tokyo, JP;
Inventors:
Assignee:
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/18 (2006.01); B41J 2/14 (2006.01); H03H 9/02 (2006.01); H01L 41/318 (2013.01); C23C 14/08 (2006.01); H01L 41/08 (2006.01); H01L 41/187 (2006.01); C01G 33/00 (2006.01); H01L 41/053 (2006.01); H01L 41/316 (2013.01);
U.S. Cl.
CPC ...
H01L 41/18 (2013.01); B41J 2/14201 (2013.01); C01G 33/00 (2013.01); C23C 14/08 (2013.01); H01L 41/0805 (2013.01); H01L 41/1873 (2013.01); H01L 41/318 (2013.01); H03H 9/02031 (2013.01); H03H 9/02574 (2013.01); H01L 41/0533 (2013.01); H01L 41/316 (2013.01);
Abstract
There is provided a laminated substrate with a piezoelectric thin film, comprising: a substrate; an electrode film formed on the substrate; and a piezoelectric thin film formed on the electrode film, wherein the piezoelectric thin film is made of an alkali niobium oxide represented by a composition formula of (KNa) NbO(0<x<1), having a perovskite structure, and oriented preferentially in (001) plane direction, and contains a metallic element selected from a group consisting of Mn and Cu at a concentration of 0.2 at % or more and 0.6 at % or less.