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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11107715 B1

PDFFull Text
Date of Patent:
Aug. 31, 2021

Filed:

Oct. 02, 2018

Semiconductor stocker systems and methods

Applicant:

Brooks Automation (Germany) Gmbh, Steißlingen, DE;

Inventor:

Lutz Rebstock, Gaienhofen, DE;

Assignee:

Brooks Automation (Germany) GmbH;

Attorneys:

Perman & Green, LLP

Colin C. Durham

Primary Examiner:

Saul Rodriguez

Assistant Examiner:

Brendan P Tighe

Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/677 (2006.01); B65B 5/08 (2006.01); B65B 31/04 (2006.01); B65B 35/16 (2006.01); B65B 63/08 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67393 (2013.01); H01L 21/67389 (2013.01); H01L 21/67769 (2013.01); B65B 5/08 (2013.01); B65B 31/04 (2013.01); B65B 35/16 (2013.01); B65B 63/08 (2013.01); H01L 21/67766 (2013.01); H01L 21/67778 (2013.01); Y10T 74/20305 (2015.01);
Abstract

In an embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber can be used to clean the stored workpieces. A purge gas system can be used to prevent contamination of the articles stored within the workpieces. A robot can be used to detect the condition of the storage compartment before delivering the workpiece. A monitor device can be used to monitor the conditions of the stocker.

Find Patent Forward Citations

Rebstock, Lutz. (2021). Semiconductor stocker systems and methods (U.S. Patent No. 11107715). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11107715

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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