The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2021
Filed:
Nov. 29, 2018
Applicant:
Scientech Corporation, Taipei, TW;
Inventors:
Assignee:
SCIENTECH CORPORATION, Taipei, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01); B08B 3/02 (2006.01); B08B 3/10 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); B08B 3/02 (2013.01); B08B 3/102 (2013.01); H01L 21/67034 (2013.01); H01L 21/67051 (2013.01); H01L 21/67057 (2013.01); H01L 21/67173 (2013.01); H01L 21/67207 (2013.01); H01L 21/67754 (2013.01); H01L 21/67766 (2013.01); H01L 21/687 (2013.01);
Abstract
A substrate processing system includes a substrate processing set and a substrate holding unit. The substrate processing set includes a substrate supporting part for supporting a vertical substrate. The substrate holding unit includes two cantilevers and two substrate holding parts. Each of the substrate holding parts is respectively located on each of the cantilevers. The two substrate holding parts are used for holding the substrate vertically. When the substrate holding unit moves next to the substrate processing set and the two substrate holding parts touch the substrate, the two substrate holding parts hold the substrate.