The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2021
Filed:
Apr. 09, 2018
Asml Netherlands B.v., Veldhoven, NL;
Alexander Ypma, Veldhoven, NL;
Vahid Bastani, Eindhoven, NL;
Dag Sonntag, Eindhoven, NL;
Jelle Nije, Leerdam, NL;
Hakki Ergün Cekli, Singapore, SG;
Georgios Tsirogiannis, Eindhoven, NL;
Robert Jan Van Wijk, Valkenswaard, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method of maintaining a set of fingerprints representing variation of one or more process parameters across wafers subjected to a device manufacturing method, the method including: receiving measurement data of one or more parameters measured on wafers; updating the set of fingerprints based on an expected evolution of the one or more process parameters; and evaluation of the updated set of fingerprints based on decomposition of the received measurement data in terms of the updated set of fingerprints. Each fingerprint may have a stored likelihood of occurrence, and the decomposition may involve: estimating, based the received measurement data, likelihoods of occurrence of the set of fingerprints in the received measurement data; and updating the stored likelihoods of occurrence based on the estimated likelihoods.