The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2021
Filed:
Aug. 01, 2016
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Matthias Manger, Aalen-Unterkochen, DE;
Assignee:
CARL ZEISS SMT GMBH, Oberkochen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 27/10 (2006.01); G01J 1/42 (2006.01); B23K 26/70 (2014.01); G01J 1/04 (2006.01); G02B 5/18 (2006.01); G02B 27/58 (2006.01); H05G 2/00 (2006.01); G01J 3/18 (2006.01);
U.S. Cl.
CPC ...
G02B 27/10 (2013.01); B23K 26/705 (2015.10); G01J 1/0407 (2013.01); G01J 1/0411 (2013.01); G01J 1/4257 (2013.01); G02B 5/1814 (2013.01); G02B 27/106 (2013.01); G02B 27/58 (2013.01); H05G 2/008 (2013.01); G01J 3/189 (2013.01);
Abstract
A beam propagation camera has at least one beam-splitting optical arrangement () configured to split a beam, which is incident on the beam-splitting optical arrangement along an optical axis (OA) of the beam propagation camera, into a multiplicity of sub-beams, and a sensor arrangement () configured to detect the sub-beams. The beam-splitting optical arrangement has a diffractive structure () configured such that at least two of the sub-beams are spatially separated from one another on the sensor arrangement and have respective foci longitudinally offset from one another along the optical axis.